Acta Optica Sinica, Volume. 16, Issue 6, 812(1996)

Phase Quadrature Laser Interferometer for Measuring Microscopic Asperity

[in Chinese]
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    The principle and fabrication of the phase quadrature laser interferometer for measuring microscopic asPerity are described. The behavior of the novel interferometer and some problems are discussed.The calculation of the measured result and sample scanning in the interferometer is performed by a PC computer. Vertical resolution is 1 nm, and lateral resolution is 10 μm. The result shows the good stability of the system.

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    [in Chinese]. Phase Quadrature Laser Interferometer for Measuring Microscopic Asperity[J]. Acta Optica Sinica, 1996, 16(6): 812

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 21, 1995

    Accepted: --

    Published Online: Dec. 4, 2006

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