Chinese Journal of Lasers, Volume. 44, Issue 4, 402003(2017)
Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire
An experimental study on the process of backside wet etching sapphire induced by pulse fiber laser is carried out by acoustic emission detector. In the backside wet etching sapphire process induced by laser, the detected acoustic emission signal contains a lot of characteristic information. The backside wet etching sapphire process can be characterized by parameters such as amplitude, marse and hit-counting of acoustic emission signal. Before the sapphire is cut through, the acoustic emission signal shows few acoustic emission events, large amplitude of 90-100 dB, large marse and small hit-counting. After the sapphire is cut through, the acoustic emission signal shows many acoustic emission events, small amplitude of 40-80 dB. Meanwhile, the marse becomes nearly zero, and the hit-counting is large.
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Luo Zhiliang, Xie Xiaozhu, Wei Xin, Hu Wei, Ren Qinglei, Jiang Wei. Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire[J]. Chinese Journal of Lasers, 2017, 44(4): 402003
Category: laser manufacturing
Received: Nov. 16, 2016
Accepted: --
Published Online: Apr. 10, 2017
The Author Email: Zhiliang Luo (1157740692@qq.com)