Chinese Optics Letters, Volume. 7, Issue 5, 05449(2009)

Optical constants of DUV/UV fluoride thin films

Chunrong Xue, Kui Yi, Chaoyang Wei, Jianda Shao, and Zhengxiu Fan
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China2 Jiangsu Laboratory of Advanced Functional Materials, Changshu Institute of Technology, Changshu 215500, China3 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, ChinaE-mail: 99xcr@163.com
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    High-refractive-index materials LaF3, NdF3, and GdF3 and low-refractive-index materials MgF2, AlF3, and Na3AlF6 single thin films are deposited by a resistive-heating boat at different depositing rates and specific substrate temperatures on single crystal MgF2 substrates. Transmittances of all fluoride thin films are measured using commercial spectrometer in the ambient atmosphere and under vacuum using synchrotron radiation instrument in the wavelength region from 190 to 500 nm. The optical constants of these materials are determined by envelope method and iterative algorithm on the basis of transmittance measurements.

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    Chunrong Xue, Kui Yi, Chaoyang Wei, Jianda Shao, Zhengxiu Fan. Optical constants of DUV/UV fluoride thin films[J]. Chinese Optics Letters, 2009, 7(5): 05449

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    Paper Information

    Received: Aug. 8, 2008

    Accepted: --

    Published Online: May. 22, 2009

    The Author Email:

    DOI:10.3788/COL20090705.0449

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