Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

Shaoqing Wang; Xiangzhao Wang

doi:10.3788/COL20100802.0177

Chinese Optics Letters, Volume. 8, Issue 2, 177(2010)

Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

Shaoqing Wang^1,2 and Xiangzhao Wang¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Graduate University of the Chinese Academy of Sciences, Beijing 100049, China

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The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker. The detected self-mixing signal is processed by the phase reconstruction method. The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum (FWHM) of 0.13 kHz. The measurement results are verified by the sinusoidal phase modulating (SPM) interferometer.

Keywords

120.0120 220.4840 230.5750

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Shaoqing Wang, Xiangzhao Wang. Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method[J]. Chinese Optics Letters, 2010, 8(2): 177

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Paper Information

Received: Apr. 23, 2009

Accepted: --

Published Online: Mar. 5, 2010

The Author Email:

DOI:10.3788/COL20100802.0177

Topics

laser devices and laser physics

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