Acta Optica Sinica, Volume. 22, Issue 1, 118(2002)
Soft X-Ray Contact Microscopy by an Atomic Force Microscope
The instruments for reading relief in the photoresist related with the resolutions of soft X-ray contact microimaging are described. Comparing the micrographs made by an atomic force microscope with that by optical microscopes experimentally, the conclusion can be drawn that the atomic force microscope is a very good method for amplifying the images in the resists.
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Jiang Shiping, Zhang Yuxuan, Gao Hongyi, Chen Jianwen, Zhang Xinyi, Xu Zhizhan. Soft X-Ray Contact Microscopy by an Atomic Force Microscope[J]. Acta Optica Sinica, 2002, 22(1): 118
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