The PBM Design and Fabrication for Silicon Waveguides

[in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 15, Issue 3, 337(1995)

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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This paper reports the use of propagsting beam method (BPM) to simulate and design the large cross-section single mode rib waveguides. The Fourier transformation is used to calculate the propagating constants of the Si waveguides. For the practical SIMOX and Si/GexSi1-x/ Si single- mode rib waveguides, Comparison of the performance differences and theoritical explanation have been given.

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propagating beam method Si optical waveguides

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[in Chinese], [in Chinese], [in Chinese]. The PBM Design and Fabrication for Silicon Waveguides[J]. Acta Optica Sinica, 1995, 15(3): 337

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