Chinese Optics Letters, Volume. 9, Issue 8, 082303(2011)

Uneven splitting-ratio 1 \times 2 multimode interference splitters based on silicon wire waveguides

Jingtao Zhou1, Huajun Shen1, Rui Jia1, Huanming Liu1, Yidan Tang1, Chengyue Yang1, Chunlai Xue2, and Xinyu Liu1
Author Affiliations
  • 1Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    Two types of 1 \times 2 multi-mode interference (MMI) splitters with splitting ratios of 85:15 and 72:28 are designed. On the basis of a numerical simulation, an optimal length of the MMI section is obtained. Subsequently, the devices are fabricated and tested. The footprints of the rectangular MMI regions are only 3 \times 18.2 and 3 \times 14.3 (\mu m). The minimum excess losses are 1.4 and 1.1 dB. The results of the test on the splitting ratios are consistent with designed values. The devices can be applied in ultra-compact photonic integrated circuits to realize the "tap" function.

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    Jingtao Zhou, Huajun Shen, Rui Jia, Huanming Liu, Yidan Tang, Chengyue Yang, Chunlai Xue, Xinyu Liu. Uneven splitting-ratio 1 \times 2 multimode interference splitters based on silicon wire waveguides[J]. Chinese Optics Letters, 2011, 9(8): 082303

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    Paper Information

    Category: Optical devices

    Received: Feb. 14, 2011

    Accepted: Mar. 25, 2011

    Published Online: Jun. 20, 2011

    The Author Email:

    DOI:10.3788/COL201109.082303

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