Optical super-resolution microscopy, enabling to break the diffraction limit, provides a powerful observation means for research on ultra-fine structures and physiological processes. It has an important impact on studying the functions of cells and the pathogenesis of diseases, which is of great biomedical significance. As a branch of super-resolution imaging methods, single molecule localization microscopy has great scientific research value. We first introduce the research background and significance of single molecule localization microscopy. Then we describe the development process of this technology in detail. In addition, the basic principles of the existing mainstream technologies are elaborated and their corresponding advantages and disadvantages are also analyzed. Finally, we prospect the applications of the single molecule localization technology.