Acta Photonica Sinica, Volume. 44, Issue 8, 805001(2015)
A Fast Convergence Solution for Calculation Diffraction of Crossed Gratings
Based on the Fourier factorization process in Lalanne′s empirical method and Gtz normal vector method,a fast convergence solution was proposed for Fourier modal slice absorption method.The gradient vectors of analytic boundary function were used to simplify the Fourier factorization process in Gtz normal vector method,which made the caclation time for a single wavelength point reduced by 2 orders of magnitude.4 typical types of normal vector fields were built by inverse distance weighting algorithm,and the degrees of freedom in normal vector method was reduced.According to these 4 normal vector fields and the Lalanne′s method,5 types of convergence improved matrice were finally presented.By pre-selection among the 5 matrice,an optimal matix could be implemented in the caculation of Fourier modal slice absorption method to guarantee fast convergence.Calculation results demonstate that for a simple silicone structure the optimal matrix has 2 diffraction oders improved compared with the un-preferred slected matrix,and effectively improves the simulation rate of diffraction.The proposed fast convergence solution is expected to improve the efficiency for grating design and analysis/testing of integrated circuit.
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DENG Hao, CHEN Shu-qiang, QUAN Jun. A Fast Convergence Solution for Calculation Diffraction of Crossed Gratings[J]. Acta Photonica Sinica, 2015, 44(8): 805001
Received: Mar. 2, 2015
Accepted: --
Published Online: Sep. 8, 2015
The Author Email: Hao DENG (383926996@qq.com)