Infrared and Laser Engineering, Volume. 50, Issue 7, 20210013(2021)

Optimal design of silicon-based optical phased array sector antenna

Yaoyuan Zhang1...2, Rui Wang1, Ruitao Jiang1,2, Kunyang Du1,2 and Yuanyang Li1 |Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Laser-Matter Interaction, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    In the optical phased array chip, the performance of the antenna unit directly determines the efficiency of the light wave energy in the waveguide to radiate outward. On this basis, the optimized design was mainly for the sector antenna. By adding a shallow etching area and a thin silicon strip to the sector antenna, the downward diffraction loss and back reflection loss of the antenna were suppressed, as well as the upward diffraction of the antenna was greatly improved. In addition, design schemes were formulated for the design requirements of improving the upward diffraction efficiency and reducing the design size. For the high diffraction efficiency scheme, the upward diffraction efficiency of the antenna reached 81.6%, the downward diffraction efficiency was reduced to 4%, and the back reflection was reduced to 1.4%. For the miniaturization scheme, the upward diffraction efficiency of the antenna was 67.2%, the downward diffraction was reduced to 5.6%, and the back reflection was reduced to 1.2%, which greatly improved the integration and emission efficiency of the optical phased array chip.

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    Yaoyuan Zhang, Rui Wang, Ruitao Jiang, Kunyang Du, Yuanyang Li. Optimal design of silicon-based optical phased array sector antenna[J]. Infrared and Laser Engineering, 2021, 50(7): 20210013

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    Paper Information

    Category: Optical design

    Received: Dec. 30, 2020

    Accepted: --

    Published Online: Aug. 23, 2021

    The Author Email:

    DOI:10.3788/IRLA20210013

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