Laser & Optoelectronics Progress, Volume. 53, Issue 12, 121203(2016)

Method of Hybrid Compensation Detection-off-Axis Parabolic Mirror

Zhang Xianzhong* and Yan Gongjing
Author Affiliations
  • [in Chinese]
  • show less

    To accomplish the high-precision testing of aspherical mirror with large aperture and deviation, a hybrid compensation detection model combining subaperture stitching with compensator is proposed. The model can realize high resolution detection of the detected mirror and provide guidance for subsequent processing when the accuracy of the mirror is not high enough to be achieved by the dynamic range of the interferometer. At the same time, it′s beyond the testing accuracy of the profile measurement. To evaluate the validity of the proposed model, a 1450 mm off-axis parabolic mirror with the hybrid compensation method is tested. To evaluate the testing accuracy, the testing result with the subaperture testing result is compared. The peak and valley value and root mean square value of the residual between them is 0.030λ and 0.003λ respectively, verifying the accuracy and validity of the model.

    Tools

    Get Citation

    Copy Citation Text

    Zhang Xianzhong, Yan Gongjing. Method of Hybrid Compensation Detection-off-Axis Parabolic Mirror[J]. Laser & Optoelectronics Progress, 2016, 53(12): 121203

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Aug. 25, 2016

    Accepted: --

    Published Online: Dec. 14, 2016

    The Author Email: Xianzhong Zhang (zhang_xian_zhong@163.com)

    DOI:10.3788/lop53.121203

    Topics