Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312025(2023)
Design of Synthetic-Wave Absolute-Distance Interferometric System Using Two-Cavity Dual-Frequency Nd∶YAG Laser with Large Frequency-Difference
A synthetic-wave absolute-distance interferometry system is proposed to achieve high-accuracy absolute-distance measurements. In this system, the light source is a quadrature-demodulated Pound-Drever-Hall frequency-stabilized two-cavity dual-frequency Nd∶YAG laser (TCDFL) with a significant frequency difference. A Mach-Zehnder interferometry structure is employed, and a synthetic-wave absolute-distance heterodyne interferometric system is designed; hence, two heterodyne interference signals with the same frequency can be obtained. The phase-difference of both heterodyne interference signals is measured to determine the fractional order of the synthetic-wave interference fringes. In addition, the integer order of the synthetic-wave interference fringes can be uniquely determined by preliminarily estimating the measured distance. Thus, absolute-distance measurements can be achieved. An experimental system of synthetic-wavelength calibration and absolute-distance interferometric measurement is established using the diode-pumped orthogonally and linearly polarized TCDFL with a frequency-difference of 24 GHz at 1064 nm. The experimental results show that the synthetic-wavelength in the air is 12.4614 mm with a standard deviation of 0.13 μm. A repeated measurement average of 899.3851 mm is obtained at a measured absolute-distance of 900 mm. Correspondingly, the standard deviation and measurement uncertainty are estimated to be 1.36 μm and 4.08 μm, respectively. This experimental study lays a solid foundation for future research and development of high-precision absolute-distance interferometers.
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Mingxing Jiao, Fei Jiang, Juan Su, Junhong Xing, Yun Liu, Tianhong Lian, Jianning Liu, Xian Wang, Hequn Li. Design of Synthetic-Wave Absolute-Distance Interferometric System Using Two-Cavity Dual-Frequency Nd∶YAG Laser with Large Frequency-Difference[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312025
Category: Instrumentation, Measurement and Metrology
Received: Oct. 8, 2022
Accepted: Nov. 22, 2022
Published Online: Feb. 13, 2023
The Author Email: Jiao Mingxing (2237663196@qq.com)