Acta Optica Sinica, Volume. 10, Issue 4, 374(1990)
Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system
The composite retro-reflector system plays the role of the cubic corner retro-reflector on 2-D interferometric controlled precioion workstage. But it is liable to cause considerable additional optical path when it is yawing. The formulan for calculating the additional optical path are derived and the measures to reduce the error are discussed in this paper.
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[in Chinese], [in Chinese]. Additional optical path caused by yaw of moving roof mirror in composite retro-refletor system[J]. Acta Optica Sinica, 1990, 10(4): 374