Chinese Journal of Lasers, Volume. 14, Issue 11, 667(1987)

Projection type holographic microscope (PHM) with double projection objectives and a holographic screen

Xu Kunxian
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  • [in Chinese]
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    A projection-type holographic microscope with double projection-objectives and a holographic screen used for integrated circuits assembly and quality control is described. The optical principle of PHM, recording scheme of holographic dispersion of screen and relative parameters of PHM are discussed.

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    Xu Kunxian. Projection type holographic microscope (PHM) with double projection objectives and a holographic screen[J]. Chinese Journal of Lasers, 1987, 14(11): 667

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    Paper Information

    Category: laser devices and laser physics

    Received: Aug. 11, 1986

    Accepted: --

    Published Online: Aug. 10, 2012

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