Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Optics Letters, Volume. 5, Issue 3, 164(2007)

[in Chinese]^1,2, [in Chinese]¹, [in Chinese]³, and [in Chinese]¹

Author Affiliations

¹Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

²Graduate School of the Chinese Academy of Sciences, Beijing 100039

³Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800

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A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60*60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.

Keywords

220.4840 230.5750 120.3180

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement[J]. Chinese Optics Letters, 2007, 5(3): 164

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Paper Information

Received: Oct. 25, 2006

Accepted: --

Published Online: Mar. 12, 2007

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology