Chinese Optics Letters, Volume. 11, Issue s1, S10206(2013)

Selective epitaxial growth of Ge nanodots with ultra-thin porous alumina membrane

Wenbo Zhan, Yourui Huangfu, Xu Fang, Xia Hong, Liang Xia, Xiongbin Guo, and Hui Ye

We demonstrate that ultra-thin porous alumina membrane (PAM) is suitable for controlling of both size and site of Ge nanodots on Si substrates. Ge nanodots are grown on Si substrates with PAM as a template at different temperatures with molecular beam epitaxy (MBE) method. Ordered Ge nanodot arrays with uniform size and high density are obtained at 400 and 500 oC. Spatial frequency spectrums transformed from scanning electron microscopy images through fast Fourier transform are utilized to analyze surface morphologies of Ge nanodots. The long-range well-ordered Ge nanodot arrays form a duplication of PAM at 400 oC while the hexagonal packed Ge nanodot arrays are complementary with PAM at 500 oC.

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Wenbo Zhan, Yourui Huangfu, Xu Fang, Xia Hong, Liang Xia, Xiongbin Guo, Hui Ye. Selective epitaxial growth of Ge nanodots with ultra-thin porous alumina membrane[J]. Chinese Optics Letters, 2013, 11(s1): S10206

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Paper Information

Category: Deposition and process control

Received: Dec. 20, 2012

Accepted: Jan. 15, 2013

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10206

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