Infrared and Laser Engineering, Volume. 51, Issue 9, 20220547(2022)

Testing of aspheric surface with low reflectivity using hybrid type computer-generated hologram (invited)

Chengli Guo1, Dekang Zheng2, Deyan Zhu3,4, Xiaofei Yang5, Yuanzheng Li1, Jian Zhang1, and Liefeng Zhao1、*
Author Affiliations
  • 1Zhejiang Sunny Optics Co., Ltd., Yuyao 315400, China
  • 2College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 3Key Laboratory of Space Photoelectric Detection and Perception, Ministry of Industry and Information Technology, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China
  • 4Aerospace Institute, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, China
  • 5School of Optoelectronic Science and Engineering, Soochow University, Suzhou 215006, China
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    Computer-generated hologram (CGH) is widely used in high-precision off-axis aspheric surface testing. In order to improve the fringe contrast in the testing process of materials with low reflectivity, a hybrid type computer-generated hologram is proposed. The alignment area uses a reflective hologram, the optimal contrast corresponding to the film reflectivity is derived based on diffraction efficiency model, the main area applies phase type CGH to achieve diffraction efficiency improvement, thereby improving the fringe contrast of the detection area. The processing of hybrid hologram is realized by multi-step photo lithography process, and the off-axis aspheric surface of glass-ceramics material is tested using the fabricated CGH. The experimental results show that the hybrid type CGH can obtain clear fringe contrast, and the final detection accuracy is better than 0.02λ(λ=632.8 nm). The proposed hybrid type CGH can be widely used in the testing of aspheric surfaces with low reflectivity material.

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    Chengli Guo, Dekang Zheng, Deyan Zhu, Xiaofei Yang, Yuanzheng Li, Jian Zhang, Liefeng Zhao. Testing of aspheric surface with low reflectivity using hybrid type computer-generated hologram (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220547

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Aug. 3, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email: Zhao Liefeng (lfzhao@sunnyoptical.com)

    DOI:10.3788/IRLA20220547

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