Acta Optica Sinica, Volume. 18, Issue 5, 583(1998)
A New Method of Evaluating the Performance of SiO2Coatings for LCD Usage
The SiO 2 films on glass substrate are widely applied in liquid crystal devices (LCD) manufacturing. The performance of SiO 2 films determine both the chemical stability and the service life of LCD to a great extent. The thickness and the density of SiO 2 coatings can be measured by P etch measurement. A simple and fast way to evaluate the performance of SiO 2 coatings for LCD usage is presented.
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[in Chinese]. A New Method of Evaluating the Performance of SiO2Coatings for LCD Usage[J]. Acta Optica Sinica, 1998, 18(5): 583
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