Acta Optica Sinica, Volume. 8, Issue 5, 454(1988)
Low-energy ion-assisted deposition of Ta2O5 films
A series of Ta2O5 films have been made by low-energy oxygen-ion assisted deposition. The microstructures of the films have been observed. The optical absorptance and scattering have been measnred too. Experiments show that transparent and homogeneous Ta2O5 films can be obtained only if ion bombardment and heating of the substrate are performed simultaneously during deposition.
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ZHOU JIuliN, ZHANG WAN, YAnG DELI. Low-energy ion-assisted deposition of Ta2O5 films[J]. Acta Optica Sinica, 1988, 8(5): 454