Properties Analysis of Ion-Implanted Planar Optical Waveguide in LiTaO<sub>3</sub>

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 17, Issue 12, 1709(1997)

Properties Analysis of Ion-Implanted Planar Optical Waveguide in LiTaO₃

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

show less

Abstract Get PDF(in Chinese)

The ion implanted planar optical waveguide in crystal LiTaO 3 was formed by implantation of He + at an energy of 2.8 MeV and with a dose of 1.4×10 16 ion/cm 2 at 300 K. The modes were observed and measured by prism coupling method. The refractive index profiles of the waveguide were calculated and compared before and after annealing. The damages on the crystal surface caused by the implantation of He + were firstly investigated by using RBS/channeling technique.

Keywords

RBS analysis refractive index ion-implanted optical waveguide

Tools

Get Citation

Copy Citation Text

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Properties Analysis of Ion-Implanted Planar Optical Waveguide in LiTaO₃[J]. Acta Optica Sinica, 1997, 17(12): 1709

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Fiber Optics and Optical Communications

Received: Sep. 8, 1996

Accepted: --

Published Online: Oct. 31, 2006

The Author Email:

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology