Acta Optica Sinica, Volume. 32, Issue 9, 912005(2012)

Absolute Flatness Measurement of Optical Elements in Synchrotron Radiation

Lin Weihao1,2、*, Luo Hongxin1, Song Li1, Zhang Yifei1, and Wang Jie1
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  • 1[in Chinese]
  • 2[in Chinese]
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    A modified method based on mirror rotational symmetry is developed to determine the absolute flatness deviations of optical elements in synchrotron radiation. The novel method is described in terms of functions that are symmetric or antisymmetric with respect to reflections at y axis. Absolute deviations of three flats can be obtained when mirror asymmetric errors are removed by N-position rotation average method. The formulas are derived for measuring the absolute surface error of the rectangular flat, and experiments on high accuracy rectangular flat are performed to verify the method. Compared with the measurement results obtained by Zygo′s three-flat application, our method is calibrated to an accuracy of better than λ/500 (λ=632.8 nm) root mean square (RMS) on height and 0.93 μrad RMS on slope error. The theoretical derivation, experimental results, and error analysis are presented.

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    Lin Weihao, Luo Hongxin, Song Li, Zhang Yifei, Wang Jie. Absolute Flatness Measurement of Optical Elements in Synchrotron Radiation[J]. Acta Optica Sinica, 2012, 32(9): 912005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 29, 2012

    Accepted: --

    Published Online: Jul. 17, 2012

    The Author Email: Weihao Lin (linweihao@sinap.ac.cn)

    DOI:10.3788/aos201232.0912005

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