Acta Optica Sinica, Volume. 20, Issue 1, 118(2000)
Additional Position Error of PSD Caused by Diffraction of Light Sourc
The principle of position sensitive detector (PSD) is introduced, and automatic determination of the center of the intensity of light spot is analyzed. Various working modes are also outlined. As a main probeam, the unavoidable diffraction of light source in many applications is pointed out. Theoretical analysis of position error caused by diffraction is presented accordingly, which makes it possible to evaluate such additional position error quantitatively and guide the application of PSD.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Additional Position Error of PSD Caused by Diffraction of Light Sourc[J]. Acta Optica Sinica, 2000, 20(1): 118