Chinese Optics Letters, Volume. 8, Issue 11, 1082(2010)

All-reflective optical system design for extreme ultraviolet lithography

Jun Chang1, Meifang Zou1, Ruirui Wang1, Shulong Feng2, and M. M. Talha1
Author Affiliations
  • 1Laboratory of Optoelectronics Technology and Information System, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
  • 2Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 343100, China
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    All-reflective optical systems, due to their material absorption and low refractive index, are used to create the most suitable devices in extreme ultraviolet lithography (EUVL). In this letter, we present a design for an all-reflective lithographic projection lens. We also discuss its design idea and structural system. After analysis of the four-mirror optical system, the initial structural parameters are determined, the optical system is optimized, and the tolerances of the system are analyzed. We also show the implementation of optimal layout and desired imaging performance.

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    Jun Chang, Meifang Zou, Ruirui Wang, Shulong Feng, M. M. Talha. All-reflective optical system design for extreme ultraviolet lithography[J]. Chinese Optics Letters, 2010, 8(11): 1082

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    Paper Information

    Received: May. 14, 2010

    Accepted: --

    Published Online: Dec. 3, 2010

    The Author Email:

    DOI:10.3788/COL20100811.1082

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