Acta Optica Sinica, Volume. 42, Issue 18, 1812004(2022)
Design, Calibration, and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer
As scientists' requirements for the polarization accuracy continue to increase, the polarization accuracy of detection equipment becomes more and more important. Therefore, how to accurately measure the polarization characteristics of components and systems in order to optimize and improve the polarization measurement accuracy of the equipment is a key issue. In this paper, a mid-infrared Mueller matrix ellipsometer is designed and established, and the system is calibrated and tested by using the non-linear fitting method and the dual-rotating method at 12.32 μm wavelength. The results show that the measurement accuracy of the Mueller matrix of the ellipsometer is better than 0.02; the repeated measurement accuracy of the transmission sample and the reflection sample is 0.01 and 0.02, respectively. This study can provide reference for the design and application of mid-infrared Muller matrix ellipsometers.
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Zhou Zheng, Junfeng Hou. Design, Calibration, and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer[J]. Acta Optica Sinica, 2022, 42(18): 1812004
Category: Instrumentation, Measurement and Metrology
Received: Jan. 13, 2022
Accepted: Mar. 25, 2022
Published Online: Sep. 15, 2022
The Author Email: Hou Junfeng (jfhou@bao.ac.cn)