Acta Optica Sinica, Volume. 42, Issue 18, 1812004(2022)

Design, Calibration, and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer

Zhou Zheng1,2 and Junfeng Hou1,2、*
Author Affiliations
  • 1National Astronomical Observatories of Chinese Academy of Sciences, Beijing 100101, China
  • 2School of Astronomy and Space Science, University of Chinese Academy of Sciences, Beijing 100049, China
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    As scientists' requirements for the polarization accuracy continue to increase, the polarization accuracy of detection equipment becomes more and more important. Therefore, how to accurately measure the polarization characteristics of components and systems in order to optimize and improve the polarization measurement accuracy of the equipment is a key issue. In this paper, a mid-infrared Mueller matrix ellipsometer is designed and established, and the system is calibrated and tested by using the non-linear fitting method and the dual-rotating method at 12.32 μm wavelength. The results show that the measurement accuracy of the Mueller matrix of the ellipsometer is better than 0.02; the repeated measurement accuracy of the transmission sample and the reflection sample is 0.01 and 0.02, respectively. This study can provide reference for the design and application of mid-infrared Muller matrix ellipsometers.

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    Zhou Zheng, Junfeng Hou. Design, Calibration, and Measurement of Single Wavelength Mid-Infrared Mueller Matrix Ellipsometer[J]. Acta Optica Sinica, 2022, 42(18): 1812004

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 13, 2022

    Accepted: Mar. 25, 2022

    Published Online: Sep. 15, 2022

    The Author Email: Hou Junfeng (jfhou@bao.ac.cn)

    DOI:10.3788/AOS202242.1812004

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