Acta Optica Sinica, Volume. 15, Issue 11, 1598(1995)
Fabrication of SOI Wavelength Demultiplexer
Silicon-on-Insulator (SOI) wavelength demultiplexers are studies by using thelarge cross-section single-mode rib waveguides conditions and the two-mode interferenceprinciple in silicon direct bonding SOI with bsck-polishing.They are fabricated by usingKOH anistropic etching. Their insertion loss are measured to be down to 4. 81 dB at thewavelength of 1.3 μm, and crosstalk is less than -18.6 dB at 1.3 μm.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of SOI Wavelength Demultiplexer[J]. Acta Optica Sinica, 1995, 15(11): 1598