Chinese Optics Letters, Volume. 10, Issue 4, 041601(2012)
Low-loss amorphous Si waveguides with gradient refractive index cladding structure
Amorphous Si waveguides with gradient refractive index cladding structure are proposed and fabricated using plasma-enhanced chemical vapor deposition method. Compared with 6 dB/cm for ridge waveguide without gradient cladding, the propagation loss of the gradient cladding waveguides is less than 1 dB/cm with both TE and TM polarizations.
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Weibin Qiu, Jiaxian Wang. Low-loss amorphous Si waveguides with gradient refractive index cladding structure[J]. Chinese Optics Letters, 2012, 10(4): 041601
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Received: Sep. 20, 2011
Accepted: Oct. 25, 2011
Published Online: Dec. 15, 2011
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