Optical Communication Technology, Volume. 48, Issue 4, 54(2024)
Design and fabrication of a 4x4 MMI coupler based on X-cut thin-film lithium niobate
Aiming at the problems of large size, high insertion loss, and complex process of multi-mode interference (MMI) coupler, a 4×4 MMI coupler based on transverse electric (TE) mode is designed on the platform of X-cut thin-film lithium niobate(X-cut TFLN). The length and width of the MMI region are simulated and optimized using the three-dimensional finite-difference time-domain (FDTD) method. Finally, a 4×4 MMI coupler is manufactured on the platform using inductive coupled plasma(ICP) etching method according to the optimization results. The simulation results show that the total insertion loss of the optimized 4×4 MMI coupler is 0.36 dB, and the actual measured insertion loss is 0.78 dB.
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DENG Ye, LI Jianping, ZHANG Zhenrong. Design and fabrication of a 4x4 MMI coupler based on X-cut thin-film lithium niobate[J]. Optical Communication Technology, 2024, 48(4): 54
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Received: Jan. 29, 2024
Accepted: --
Published Online: Oct. 11, 2024
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