Acta Optica Sinica, Volume. 29, Issue 11, 3212(2009)
Study on Curing Control and Focal Spot Measurement of Aspherical Liquid Microlens
Aspherical liquid microlens of ultra-violet(UV) curable polymer was fabricated by using electrostatic field and real-time measurement.It was investigated that the surface profile and focal spot of the aspherical liquid lens had distortions while UV curing.The surface profiles and the focal spots before and after curing were compared.The reasons why distortion happened,its influence on lens′s optical quality and how it can be solved were all discussed.Spot probe scanning microscope with 50 nm resolution was employed to accurately measure the focal spots of the aspherical microlens.The spots at different axis positions and focal spot with 0.384 μm diameter were achieved.The point spread function and optical transfer function of the aspherical microlens were calculated,and the actual imaging photographs were provided.So the imaging ability of the aspherical microlens can be evaluated and it′s important for perfecting the lens fabricating technology.
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Zhan Zhenxian, Wang Keyi, Yao Haitao, Ding Zhizhong. Study on Curing Control and Focal Spot Measurement of Aspherical Liquid Microlens[J]. Acta Optica Sinica, 2009, 29(11): 3212
Category: Optical Devices
Received: Dec. 24, 2008
Accepted: --
Published Online: Nov. 16, 2009
The Author Email: Zhenxian Zhan (xianzz@mail.ustc.edu.cn)