Acta Optica Sinica, Volume. 35, Issue 7, 705001(2015)
An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System
Interference fringe period is a very important parameter of phase locking in scanning beam interference lithography system (SBIL). According to the feature of the SBIL system, a method that period is measured by moving beam-splitter is proposed. Based on Gaussian beam propagation theory, theoretical error is analyzed. Period counting method is proposed to calculate fringe period. In order to make it easy for two-dimension stage design, measuring period by short-stroke linear stage’s assistance is put forward and experiments are done. The results show that: the method that measuring period by short-stroke linear stage’s assistance is feasible in principle. When fringe density is 1800 line/mm in SBIL system, period measurement repeatability is 1.08 ×10-5 (1σ). Data measured in exposure experiments is consistent with the model, then the feasibility of this method is verified.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Accurate Method for Measuring Interference Fringe Period in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2015, 35(7): 705001
Category: Diffraction and Gratings
Received: Nov. 20, 2014
Accepted: --
Published Online: May. 20, 2015
The Author Email: (jiangshan0122@126.com)