Chinese Optics Letters, Volume. 10, Issue s2, S21304(2012)

Fabrication of high-Q polymer microring resonators

Jie Teng, Junbo Feng, Jin Guo, and Mingshan Zhao

A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining waveguides. The PSQ-L polymer film shows good optical properties and high thermal stability. The all polymer microring resonator is fabricated by conventional lithography and ICP etching process. About 3-dB extinction ratio from the through port and 23-dB extinction ratio from the drop port are obtained. A high Q value of 5.7×104 is obtained. The optical loss of the bending waveguides is estimated to be 1.6 dB/cm. The high Q polymer ring resonators show potential in sensing applications.

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Jie Teng, Junbo Feng, Jin Guo, Mingshan Zhao. Fabrication of high-Q polymer microring resonators[J]. Chinese Optics Letters, 2012, 10(s2): S21304

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Paper Information

Category: Integrated Optics

Received: Jul. 12, 2012

Accepted: Sep. 4, 2012

Published Online: Jan. 5, 2013

The Author Email:

DOI:10.3788/col201210.s21304

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