Infrared and Laser Engineering, Volume. 48, Issue 3, 306003(2019)
Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method
As non-metallic materials have strong absorption of long-wave infrared laser, the CO2 laser is often used to prepare PMMA micro-channels. Due to the Gaussian distribution of the laser light intensity, the cross-section of the micro-channels prepared by the conventional method is triangular. This can′t meet the practical application requirements in the microfluidic chip. In this paper, a CO2 laser multi-path translational method was proposed, which used the HAZ formed by the first etching as a boundary multi-pass lateral overlap translation etching, so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared. In addition, the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section, HAZ, surface roughness.
Get Citation
Copy Citation Text
Wu Tianhao, Ke Changjun, Jiang Yongheng, Kong Xinyi, Zhong Yanhong. Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method[J]. Infrared and Laser Engineering, 2019, 48(3): 306003
Category: 激光技术及应用
Received: Oct. 10, 2018
Accepted: Nov. 20, 2018
Published Online: Apr. 6, 2019
The Author Email: Tianhao Wu (ellis.wuth@gmail.com)