Infrared and Laser Engineering, Volume. 48, Issue 3, 306003(2019)

Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method

Wu Tianhao1,2、*, Ke Changjun1, Jiang Yongheng3, Kong Xinyi1,2, and Zhong Yanhong1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    As non-metallic materials have strong absorption of long-wave infrared laser, the CO2 laser is often used to prepare PMMA micro-channels. Due to the Gaussian distribution of the laser light intensity, the cross-section of the micro-channels prepared by the conventional method is triangular. This can′t meet the practical application requirements in the microfluidic chip. In this paper, a CO2 laser multi-path translational method was proposed, which used the HAZ formed by the first etching as a boundary multi-pass lateral overlap translation etching, so that high quality micro-channels with ideal trapezoid cross section can be quickly prepared. In addition, the micro-channel fabricated in this way is smoother and more practical compared with the static multi-pass method in cross-section, HAZ, surface roughness.

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    Wu Tianhao, Ke Changjun, Jiang Yongheng, Kong Xinyi, Zhong Yanhong. Preparation of high quality trapezoid PMMA micro-channels by CO2 laser multi-path translational method[J]. Infrared and Laser Engineering, 2019, 48(3): 306003

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    Paper Information

    Category: 激光技术及应用

    Received: Oct. 10, 2018

    Accepted: Nov. 20, 2018

    Published Online: Apr. 6, 2019

    The Author Email: Tianhao Wu (ellis.wuth@gmail.com)

    DOI:10.3788/irla201948.0306003

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