Acta Optica Sinica, Volume. 21, Issue 3, 380(2001)
Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber-Optical Confocal Scanning Imaging Microscope
By utilizing the axial response curve of fiber optical confocal scanning microscope, a new technique for measuring the micro position has been developed. Using this technique, the converse piezoelectric expend and contract of PZT with resolution as high as 5 nm was measured.
Keywords
Tools
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber-Optical Confocal Scanning Imaging Microscope[J]. Acta Optica Sinica, 2001, 21(3): 380
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20