Laser & Optoelectronics Progress, Volume. 59, Issue 19, 1931003(2022)
High Crystallization Quality β-Ga2O3 Films Prepared by Chemical Vapor Deposition
In order to obtain high-quality films and reduce experimental costs, β-Ga2O3 films were synthesized on mica substrates by chemical vapor deposition using GaTe powder as the Ga source. High crystalline quality β-Ga2O3 thin films were obtained by changing the growth temperature, buffer gas, and growth time, which were confirmed by X-ray diffraction (XRD) and Raman spectroscopy. XRD results showed that the optimal growth temperature of the film was 750 ℃. A comparison of β-Ga2O3 films synthesized under different buffer gases revealed Ar to be the best environment for growing film materials. The growth time of the thin films was changed under an Ar atmosphere to achieve β-Ga2O3 thin films with high crystalline quality. XRD results showed that the thin film with a growth time of 20 min had high crystalline quality. Finally, it was transferred to a Si/SiO2 substrate with a 300 nm thick oxide layer and tested by atomic force microscopy to obtain a 16 nm thick two-dimensional Ga2O3 film.
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Xingchen Li, Fengyuan Lin, Huimin Jia, Yubin Kang, Yongji Shi, Bingheng Meng, Dan Fang, Jilong Tang, Dengkui Wang, Kexue Li, Xueying Chu, Zhipeng Wei. High Crystallization Quality β-Ga2O3 Films Prepared by Chemical Vapor Deposition[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1931003
Category: Thin Films
Received: Sep. 6, 2021
Accepted: Oct. 11, 2021
Published Online: Oct. 11, 2022
The Author Email: Lin Fengyuan (linfengyuan_0116@163.com)