Semiconductor Optoelectronics, Volume. 43, Issue 2, 285(2022)
Research Progresses of Integrated High-speed APD
The general methods for reducing the noise of avalanche photodiode (APD) and improving its gain and bandwidth were analyzed. Aiming at the inherent contradict ion between the responsivity and bandwidth, the solutions were proposed in this paper, such as using three-dimensional nano-technology to reduce the noise of APD and using integrated optical technology to improve the responsivity. The research progresses of integrated high-speed APD were summarized, including the following three aspects: hybrid integration of surface plasmon focusing structure with APD of vertical light incidence, hybrid integration of super lens with APD of vertical light incidence, and monolithic integration of arrayed waveguide grating (AWG) and evanescent wave coupling waveguide APD of side optical incident. The development trends were prospected as well.
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ZHAO Yanli, LI Qian, ZHANG Hewei, DING Wenqiang, YU Xuzhen, FENG Xuyang, LIN Zebiao, TIAN Yang, ZENG Xuan. Research Progresses of Integrated High-speed APD[J]. Semiconductor Optoelectronics, 2022, 43(2): 285
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Received: Mar. 10, 2022
Accepted: --
Published Online: Jul. 21, 2022
The Author Email: Yanli ZHAO (yanlizhao@mail.hust.edu.cn)