Vector diffraction model of photon sieves with different polarized illumination is built based on angular spectrum representation. Simulations are carried out to analyze the intensity of photon sieves, focal spot when polarizations of incident planar beams are linear, radial and tangent, respectively. Result shows that the polarization property of incident beams makes huge influence on the focal spot of photon sieves with high numerical aperture. With linearly polarized beams, the focal spot extends in the polarized direction. By using tangent polarization, there is a dark hole in the center of the focal spot. The focal spot of radially polarized beam has a form of a circle and the focus is deeper. In laser lithography systems and imaging systems, resolution power can be improved by using radially polarized beam as the incident beam of photon sieves.