Laser & Optoelectronics Progress, Volume. 55, Issue 1, 11410(2018)
3D Femtosecond Laser Nanoprinting
Devices in a diversity of application scopes are now evolving towards miniaturization, functionalization and integration. Finely-patterned 3D micro-nanostructures are in great demand as core components in more and more devices. This keeps challenging the current micro-nanofabrication techniques. 3D femtosecond laser nanoprinting (FsLNP) is an outstanding mask-free three-dimensional additive fabrication technique with both powerful designability and high accuracy far beyond the optical diffraction limit. Based on the unique two-photon photopolymerization mechanism of 3D FsLNP, a series of highly efficient and well-functioned micro-nanodevices can be fabricated when suitable photopolymerization scheme and structure arrangement are given. In this review, we briefly introduce the technical essentials and physical fundamentals of 3D FsLNP, as well as several typical application examples.
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Liu Monan, Li Mutian, Sun Hongbo. 3D Femtosecond Laser Nanoprinting[J]. Laser & Optoelectronics Progress, 2018, 55(1): 11410
Category: Lasers and Laser Optics
Received: Aug. 9, 2017
Accepted: --
Published Online: Sep. 10, 2018
The Author Email: Hongbo Sun (hbsun@jlu.edu.cn)