Acta Optica Sinica, Volume. 40, Issue 19, 1912001(2020)
Precise Tilt Platform Using Position Sensitive Detector and Control Method for Tilt Angle
A precise tilt platform driven by piezoelectric ceramics and the control method for tilt angle are designed to achieve high precision tilt control. The control system is mainly composed of a main controller, a displacement detection module, a digital-to-analog conversion module, and a high-voltage driving module, which can realize fast and precise tilt control. The method combining the ball lens and the position sensitive sensor is used to measure and control the tilt angle of the precise tilt control platform. Experimental results show that the control precision of the platform is better than 0.5 μrad, and the structure is simple and easy to install. It is especially suitable for engineering application environments that have the requirements of precise tilt control and low cost.
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Cong Ji, Zixuan Wang, Gang Yang, Jing Wang, Liming Wu, Helin Wang, Bin Wu, Bing Cheng, Chunlin Chen, Gewen Sun, Shaohua Chang, Ning Zhang, Xiaolong Wang, Qiang Lin. Precise Tilt Platform Using Position Sensitive Detector and Control Method for Tilt Angle[J]. Acta Optica Sinica, 2020, 40(19): 1912001
Category: Instrumentation, Measurement and Metrology
Received: May. 12, 2020
Accepted: Jun. 15, 2020
Published Online: Sep. 23, 2020
The Author Email: Ji Cong (congjisu@163.com), Wang Xiaolong (xlwang@zjut.edu.cn), Lin Qiang (qlin@ zjut.edu.cn;)