For a specified digital optoelectronic tracking system, we analyze a kind of equalized clearance nonlinearity generated by the quantification and optoelectronic sensor delay when the system is in TV tracking mode. Two main theoretical expressions of nonlinearity are shown. Then, the measured self-oscillation is characterized with the description function. The double mode PWM driver is used in the digital optoelectronic tracking system. In positioning experiments, the maximum peak-peak value of positioning error is less than 22.23″. The results show that zero-jitter feature of the double mode PWM driver can greatly restrain the self-oscillation nonlinearity.