Chinese Journal of Lasers, Volume. 37, Issue 12, 3121(2010)

Influence of the Laser Pulsed Energy upon the Diamond-Like Carbon Film and Its Infrared Property

Luo Le1、*, Zhang Junfang1, Fang Xiaodong2, Xia Tianrong1, Qin Juanjuan1, and Tao Ruhua2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    In order to investigate how the laser pulsed energy influences the microstructure, topography and infrared property of the diamond-like carbon (DLC) film in pulsed laser deposition (PLD), the DLC films are deposited on Si substrates by 120 mJ and 150 mJ KrF excimer pulsed laser in the chamber with 10-1 Pa N2 respectively while other experimental conditions are kept unchangeable. The microstructure and composition of the DLC films are detected by the visible Raman spectroscopy and the X-ray photoelectron spectroscopy (XPS). The topography of the DLC films is detected by the atomic force microscopy (AFM). The infrared transmission spectra of the DLC films and Si substrate are detected by the Fourier transform infrared (FTIR) spectroscopy. The experimental result demonstrates that when the laser pulsed energy is enhanced from 120 mJ to 150 mJ, the fraction of N atoms and sp3 bonded carbon atoms increase in the DLC films; the fraction of CO, C=O and O decrease in the films; the size and number of graphitic crystallites decrease in the films; the roughness of the DLC films decreases remarkably. At the same time, the infrared antireflection rate of the DLC films decreases and the infrared antireflection range of the DLC films becomes narrow when pulsed energy is enhanced.

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    Luo Le, Zhang Junfang, Fang Xiaodong, Xia Tianrong, Qin Juanjuan, Tao Ruhua. Influence of the Laser Pulsed Energy upon the Diamond-Like Carbon Film and Its Infrared Property[J]. Chinese Journal of Lasers, 2010, 37(12): 3121

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    Paper Information

    Category: materials and thin films

    Received: May. 11, 2010

    Accepted: --

    Published Online: Mar. 12, 2014

    The Author Email: Le Luo (luolehfut@sohu.com)

    DOI:10.3788/cjl20103712.3121

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