Laser & Optoelectronics Progress, Volume. 49, Issue 1, 12203(2012)
Position-Setting Stress Control of the Square-Aperture Piezoelectricity Film Deformable Mirror
Based on finite element method, simulation about the property of piezoelectricity film deformable mirror (PFDM) under three-point position-setting is done. The results show that the contact between mirror and frame can cause nonlinear response. For solving this problem, two methods are proposed. Simulation results show that both of them can weaken the nonlinear response.
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Wang Deen, Dai Wanjun, Zhang Junwei, Hu Dongxia, Li Xiaoqun. Position-Setting Stress Control of the Square-Aperture Piezoelectricity Film Deformable Mirror[J]. Laser & Optoelectronics Progress, 2012, 49(1): 12203
Category: Optical Design and Fabrication
Received: Sep. 1, 2011
Accepted: --
Published Online: Nov. 2, 2011
The Author Email: Deen Wang (sduwde@126.com)