Acta Optica Sinica, Volume. 33, Issue 12, 1231002(2013)

Fabrication and Optical Properties of Vanadium Dioxide Thin Films Doped by Tungsten-Vanadium Co-Sputtering

Qin Yuan1、*, Li Yi1,2, Fang Baoying1, Tong Guoxiang1, Wang Xiaohua1,3, Ding Jie1, Wang Feng1, Yan Meng1, Liang Qian1, Chen Shaojuan1, Chen Jiankun1, Zheng Hongzhu1, and Yuan Wenrui1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less

    In order to reduce high phase transition temperature and improve low transmittance contrast in the infrared (IR) region before and after phase transition caused by doping, W-doped VO2 thin films with an obvious thermochromic behavior are fabricated by W-V co-sputtering on the glass substrates and annealed in a mixture of N2 and O2. Component and structure of VO2 thin films oxidized in different ratios of N2-O2 mixture are analyzed. Results reveal that VO2 grows in preferential crystal orientations along (011) and (200), and the particle dimension increases from 50 nm to 80 nm as O2 content rises. Phase transition temperature of W-doped VO2 thin films reduces to 31 ℃, transmittance contrast in the IR region before and after phase transition is 41%. Results demonstrate that proper W-doped concentration can reduce the phase transition temperature, improve IR transmittance spectrum and gently change the transmittance contrast.

    Tools

    Get Citation

    Copy Citation Text

    Qin Yuan, Li Yi, Fang Baoying, Tong Guoxiang, Wang Xiaohua, Ding Jie, Wang Feng, Yan Meng, Liang Qian, Chen Shaojuan, Chen Jiankun, Zheng Hongzhu, Yuan Wenrui. Fabrication and Optical Properties of Vanadium Dioxide Thin Films Doped by Tungsten-Vanadium Co-Sputtering[J]. Acta Optica Sinica, 2013, 33(12): 1231002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Jun. 3, 2013

    Accepted: --

    Published Online: Dec. 5, 2013

    The Author Email: Yuan Qin (qqyy11111@yeah.net)

    DOI:10.3788/aos201333.1231002

    Topics