Chinese Journal of Lasers, Volume. 16, Issue 8, 479(1989)

Opto-heterodvne measurement or rousrhness of supersmooth surraces

Lin Yao, Zhou Zhiyao, and Wang Runwen
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    Lin Yao, Zhou Zhiyao, Wang Runwen. Opto-heterodvne measurement or rousrhness of supersmooth surraces[J]. Chinese Journal of Lasers, 1989, 16(8): 479

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    Paper Information

    Category: laser manufacturing

    Received: Jan. 4, 1988

    Accepted: --

    Published Online: Aug. 13, 2012

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