Electro-Optic Technology Application, Volume. 26, Issue 4, 14(2011)

Error Analysis and Correction Methods of Dual Galvanometer Scanning

HAN Wan-peng1... MENG Wen1, LI Yun-xia1, LI Da-wei1 and ZHOU Jia2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    The two-dimensional laser galvanometer technology is widely used for the characters of high speed,high precision and good controllability. Due to the intrinsic geometric distortion on the scanning field, and linear,nonlinear and other errors of the system,the scanning quality of the laser galvanometer system is seriously affected in different application fields. The geometric distortion and various errors are profoundly analyzed about the pre-object and post-object scanning models,and the pertinence compensation methods are advanced too. Some views and suggestions are put forward,the correction methods are also conceived on the basis of the theoretical analysis about various errors.

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    HAN Wan-peng, MENG Wen, LI Yun-xia, LI Da-wei, ZHOU Jia. Error Analysis and Correction Methods of Dual Galvanometer Scanning[J]. Electro-Optic Technology Application, 2011, 26(4): 14

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    Paper Information

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    Received: Jun. 28, 2011

    Accepted: --

    Published Online: Sep. 9, 2011

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    DOI:

    CSTR:32186.14.

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