Optics and Precision Engineering, Volume. 21, Issue 2, 400(2013)
Large-scale MOEMS scanning mirror actuated by vertical comb
A Micro-opto Electro-mechanical System(MOEMS) scanning mirror with a large size, large torsional angles and a low driving voltage actuated by a vertical comb driver was proposed. The working principle of the vertical comb driver was analyzed and its fabrication process was discussed. By using a bulk micromaching process technology combined with a silicon-silicon bonding process, a vertical comb driver actuated MOEMS scanning mirror was fabricated. The fabricated scanning mirror has a size of 3 mm×2 mm,and a resonant frequency of 1.32 kHz. The test results show that the mirror has a high quality optical surface and the RMS of surface roughness is only 8.64 nm.When the driving voltage is set to be 95 V, the maximum rotation angle of the mirror is 2.4°.Furthermore, the tested turn-on responding time and turn-off responding time for the mirror are 1.887 ms and 4.418 ms,respectively.
Get Citation
Copy Citation Text
LIU Ying-ming, XU Jing, ZHONG Shao-long, ZHAI Lei-ying, WU Ya-ming. Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Optics and Precision Engineering, 2013, 21(2): 400
Category:
Received: Sep. 5, 2012
Accepted: --
Published Online: Feb. 26, 2013
The Author Email: Ying-ming LIU (liuyingming@mail.sim.ac.cn)