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Acta Optica Sinica, Volume. 18, Issue 6, 808(1998)

A Study of Properties of Optical Guided-Wave Structure Based on Silicon

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The properties of SiON optical waveguides based on silicon formed by plasma-enhanced chemical vapor deposition are discussed, and the structures of channel waveguide, strip waveguide, inverted ridge waveguide are designed. The results of technical fabrication are analysed, and some improvming methods are presented.

    Keywords
    integrated opticsoptoelectronic integrated circuit (LEIC)silicon matrixSiONoptical waveguide
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Study of Properties of Optical Guided-Wave Structure Based on Silicon[J]. Acta Optica Sinica, 1998, 18(6): 808

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    Paper Information

    Category: Fiber Optics and Optical Communications

    Received: Feb. 8, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology