Spectroscopy and Spectral Analysis, Volume. 36, Issue 3, 635(2016)
Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature
The polycrystalline silicon thin films play an important role in the field of electronics. In the paper, α-SiAl composite membranes on glass substrates was prepared by magnetron co-sputtering. The contents of Al radicals encapsulated in the α-Si film can be adjusted by changing the Al to Si sputtering power ratios. The as-prepared α-Si films were converted into polycrystalline films by using a rapid thermal annealing (RTP) at low temperature of 350 ℃ for 10 minutes in N2 atmosphere. An X-ray diffractometer, and Raman scattering and UV-Visible-NIR Spectrometers were used to characterize the properties of the Pc-Si films. The influences of Al content on the properties of the Pc-Si films were studied. The results showed that the polycrystalline silicon films were obtained from α-SiAl composite films which were prepared by magnetron co-sputtering at a low temperature following by a rapid thermal annealing. The grain size and the degree of crystallization of the Pc-Si films increased with the increase of Al content, while the optical band gap was reduced. The nc-Si films were prepared when the Al to Si sputtering power ratio was 0.1. And a higher Crystallization rate (≥85%) of polycrystalline silicon films were obtained when the ratio was 0.3. The band gaps of the polycrystalline silicon films can be controlled by changing the aluminum content in the films.
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DUAN Liang-fei, YANG Wen, ZHANG Li-yuan, LI Xue-ming, CHEN Xiao-bo, YANG Pei-zhi. Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature[J]. Spectroscopy and Spectral Analysis, 2016, 36(3): 635
Received: Oct. 11, 2014
Accepted: --
Published Online: Dec. 9, 2016
The Author Email: Liang-fei DUAN (liangfeiduan@hotmail.com)