Acta Optica Sinica, Volume. 39, Issue 9, 0912003(2019)
Full-Field Heterodyne Long-Cavity Interferometry
This paper proposes a new laser interferometer which is suitable for measuring the profile of an optical lens with a long focal length. Full-field heterodyne phase-shift technology is used to suppress the effects of factors such as vibration and the atmosphere on long-cavity interferometry. The heterodyne coherent measurement of the measured and reference wavefronts is achieved using a Twyman-Green interferometer structure. Experimental equipment is developed, and an experiment is conducted to prove that the novel setup can suppress the influences of external vibration and atmospheric turbulence on the measurement accuracy,achieving a long-cavity measurement with a root mean square repeated measurement accuracy of 0.45‰λ. Thus, this technology can prove to be a valuable alternative to traditional long-cavity interferometry.
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Zhou Wu, Yang Li, Bin Xiangli, Wenxi Zhang, Xinxin Kong, Wanqi Shang, Tong Lü. Full-Field Heterodyne Long-Cavity Interferometry[J]. Acta Optica Sinica, 2019, 39(9): 0912003
Category: Instrumentation, Measurement and Metrology
Received: Mar. 29, 2019
Accepted: May. 21, 2019
Published Online: Sep. 9, 2019
The Author Email: Li Yang (liyang@aoe.ac.cn), Xiangli Bin (xiangli_aoe@163.com), Zhang Wenxi (zhangwenxi@aoe.ac.cn)