Acta Optica Sinica, Volume. 39, Issue 9, 0912003(2019)

Full-Field Heterodyne Long-Cavity Interferometry

Zhou Wu1,2,3, Yang Li1,2,3、***, Bin Xiangli1,2、**, Wenxi Zhang1,2,3、*, Xinxin Kong1,2, Wanqi Shang1,2,3, and Tong Lü1,2,3
Author Affiliations
  • 1 Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2 Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China
  • 3 University of Chinese Academy of Sciences, Beijing 100049, China
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    This paper proposes a new laser interferometer which is suitable for measuring the profile of an optical lens with a long focal length. Full-field heterodyne phase-shift technology is used to suppress the effects of factors such as vibration and the atmosphere on long-cavity interferometry. The heterodyne coherent measurement of the measured and reference wavefronts is achieved using a Twyman-Green interferometer structure. Experimental equipment is developed, and an experiment is conducted to prove that the novel setup can suppress the influences of external vibration and atmospheric turbulence on the measurement accuracy,achieving a long-cavity measurement with a root mean square repeated measurement accuracy of 0.45‰λ. Thus, this technology can prove to be a valuable alternative to traditional long-cavity interferometry.

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    Zhou Wu, Yang Li, Bin Xiangli, Wenxi Zhang, Xinxin Kong, Wanqi Shang, Tong Lü. Full-Field Heterodyne Long-Cavity Interferometry[J]. Acta Optica Sinica, 2019, 39(9): 0912003

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 29, 2019

    Accepted: May. 21, 2019

    Published Online: Sep. 9, 2019

    The Author Email: Li Yang (liyang@aoe.ac.cn), Xiangli Bin (xiangli_aoe@163.com), Zhang Wenxi (zhangwenxi@aoe.ac.cn)

    DOI:10.3788/AOS201939.0912003

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