Optics and Precision Engineering, Volume. 32, Issue 1, 62(2024)
Two-DOF piezoelectric stick-slip positioning platform with large strokes and no coupling
Aiming at the multidimensional, extensive range, and precision positioning requirements regarding micromanipulation and micro-assembly tasks, two degree-of-freedom (DOF) parallel positioning platforms with large strokes and no coupling are designed. A bridge-type mechanism was adopted to amplify the displacement of the built-in piezoelectric actuator, and combined with a composite decoupling structure to form a two-dimensional compliant driving mechanism. Crossed roller guides connected the moving stage with the driving mechanism and adjust the contact friction via preload screws, thus good stick-slip motion characteristics were realized. Then, a finite element method was used to establish the static model of the positioning stage, and the displacement amplification, stress, and inherent frequency were simulated and analyzed. Finally, an experimental test system was built to verify the output performance of the positioning platform. The results show that in the scanning drive mode, when the driving voltage is 150 V, the output displacements of the platform in the x- and y- directions are 63.84 and 62.61 μm, respectively. Further, the coupling ratios are 0.52% and 0.59%, and resolutions are 6.5 nm and 7.2 nm, respectively. In the stepping drive mode, when the driving voltage is 120 V, the single-step displacements of the platform in the x- and y- directions correspond to 47.31 and 47.20 μm, respectively. In addition, the coupling ratios are 0.69% and 0.73%; motion resolutions in x-forward, x-reverse, y-forward, and y-reverse are 0.49, 0.47, 0.47, and 0.42 μm, respectively; and the maximum vertical load is 50 N. The designed piezoelectric stick-slip positioning platform thus meets the required performance requirements.
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Tong WU, Yiling YANG, Gaohua WU, Yuguo CUI, Yanding WEI. Two-DOF piezoelectric stick-slip positioning platform with large strokes and no coupling[J]. Optics and Precision Engineering, 2024, 32(1): 62
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Received: Mar. 29, 2023
Accepted: --
Published Online: Jan. 23, 2024
The Author Email: YANG Yiling (yangyiling@nbu.edu.cn)