Electronics Optics & Control, Volume. 29, Issue 7, 114(2022)
Dynamic Hysteresis Modeling and Robust Control of Piezoelectric Micro-motion Rod
The piezoelectric micro-motion rod is a key component of the active focusing system of optical equipment, but the nonlinear piezoelectric hysteresis and complex electromechanical coupling effects seriously affect the output displacement accuracy of the piezoelectric micro-motion rod,thus affecting the performance of the optical equipment.In order to realize high-precision control of the piezoelectric micro-motion rod, a multi-field coupling dynamic model of hysteresis is established.Furthermore, a robust composite controller is designed for the piezoelectric micro-motion rod.The composite controller consists of the robust H∞ feedback controller and the feedforward compensator based on the inverse Bouc-Wen hysteresis model.The proposed control method can compensate for the effects of piezoelectric hysteresis and improve the control accuracy while ensuring the robustness of the system.Finally, the experimental system of the piezoelectric micro-motion rod is designed to verify the effectiveness of the proposed modeling and control method.The experimental results validate that the proposed robust composite control method can realize high-precision control of the displacement of the piezoelectric micro-motion rod.
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WANG Haifeng, FENG Xingwei, LI Qing, YANG Yi, PAN Zhifeng. Dynamic Hysteresis Modeling and Robust Control of Piezoelectric Micro-motion Rod[J]. Electronics Optics & Control, 2022, 29(7): 114
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Received: Aug. 15, 2019
Accepted: --
Published Online: Aug. 1, 2022
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