Acta Optica Sinica, Volume. 34, Issue 3, 312006(2014)

Refractive Index Distribution and Surface Profile Measurement of Micro-Optics Based on Dual Wavelength Digital Holography

Deng Lijun1、*, Yang Yong1, Shi Bingchuan1, Ma Zhonghong1, Ge Qi2, and Zhai Hongchen1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    A method based on dual wavelength digital holography is proposed to measure the refractive index distribution and surface profile of micro-optics elements. Micro-optics elements are immersed in refractive index matching liquid to reduce the frequency of transmission light. The digital holograms of micro-optics elements are obtained under illumination of two different wavelengths, the refractive index distribution of micro-optics elements can be obtained according to phase distribution under two wavelengths. Surface profile of micro-optics elements can be calculated based on the refractive index distribution. Theoretical analysis and optical experimental results are performed to demonstrate its validity.

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    Deng Lijun, Yang Yong, Shi Bingchuan, Ma Zhonghong, Ge Qi, Zhai Hongchen. Refractive Index Distribution and Surface Profile Measurement of Micro-Optics Based on Dual Wavelength Digital Holography[J]. Acta Optica Sinica, 2014, 34(3): 312006

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 12, 2013

    Accepted: --

    Published Online: Feb. 28, 2014

    The Author Email: Lijun Deng (jxljdeng2008@163.com)

    DOI:10.3788/aos201434.0312006

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